Commentaries

Commentary: Multichannel ellipsometry for monitoring processes

[+] Author Affiliations
Ilsin An

Hanyang University, Department of Applied Physics, Sa-1-dong, Ansan, 426-791 Republic of Korea

J. Nanophoton. 4(1), 040302 (March 9, 2010). doi:10.1117/1.3374056
History: Received February 24, 2010; Accepted February 25, 2010; March 9, 2010; Online March 09, 2010
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Abstract

A short technical commentary on a specific topic.

References

K. Vedam, "Spectroscopic ellipsometry: a historical overview," Thin Solid Films 313/314, 1-9 (1998)
R. W. Collins, I. An, H. Fujiwara, J. Lee, Y. Lu, J. Koh, and P. I. Rovira, "Advances in multichannel spectroscopic ellipsometry," Thin Solid Films 313-314, 18-32 (1998)
I. An, H. V. Nguyen, N. V. Nguyen, and R. W. Collins, "Microstructural evolution of ultrathin amorphous silicon films by real-time spectroscopic ellipsometry," Phys. Rev. Lett. 65, 2274-2277 (1990)
C. Pickering, "Complementary in-situ and post-deposition diagnostics of thin film semiconductor structures," Thin Solid Films 313/314, 406-415 (1998)
I. An and D. Seong, "Morphological development and etching of gold thin film under UV-exposure in chlorine-based liquids," Chem. Lett. 33, 1232-1235 (2004)
I. An, "Development of vacuum ultraviolet multichannel ellipsometry and its application to the characterization of ultrathin zirconium oxide films," J. Nanophoton. 2, 021905 (2008)
Z. Wang and G. Jin, "Covalent immobilization of proteins for the biosensor based on imaging ellipsometry," J. Immunol. Methods 285, 237-243 (2004)
A. J. Choi, T. H. Ghong, Y. D. Kim, J. H. Oh, and J. Jang, "Imaging ellipsometry study on the Ni-mediated crystallization of a-Si," J. Appl. Phys. 100, 113529 (2006)
W. Chegal, S. Kim, Y. Kwak, H. Cho, and Y Lee, "Mono-axial power spectrograph for a spectral imaging ellipsometer: design and experimental results," Meas. Sci. Technol. 14, 558-562 (2003)
© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Ilsin An
"Commentary: Multichannel ellipsometry for monitoring processes", J. Nanophoton. 4(1), 040302 (March 9, 2010). ; http://dx.doi.org/10.1117/1.3374056


Figures

Tables

References

K. Vedam, "Spectroscopic ellipsometry: a historical overview," Thin Solid Films 313/314, 1-9 (1998)
R. W. Collins, I. An, H. Fujiwara, J. Lee, Y. Lu, J. Koh, and P. I. Rovira, "Advances in multichannel spectroscopic ellipsometry," Thin Solid Films 313-314, 18-32 (1998)
I. An, H. V. Nguyen, N. V. Nguyen, and R. W. Collins, "Microstructural evolution of ultrathin amorphous silicon films by real-time spectroscopic ellipsometry," Phys. Rev. Lett. 65, 2274-2277 (1990)
C. Pickering, "Complementary in-situ and post-deposition diagnostics of thin film semiconductor structures," Thin Solid Films 313/314, 406-415 (1998)
I. An and D. Seong, "Morphological development and etching of gold thin film under UV-exposure in chlorine-based liquids," Chem. Lett. 33, 1232-1235 (2004)
I. An, "Development of vacuum ultraviolet multichannel ellipsometry and its application to the characterization of ultrathin zirconium oxide films," J. Nanophoton. 2, 021905 (2008)
Z. Wang and G. Jin, "Covalent immobilization of proteins for the biosensor based on imaging ellipsometry," J. Immunol. Methods 285, 237-243 (2004)
A. J. Choi, T. H. Ghong, Y. D. Kim, J. H. Oh, and J. Jang, "Imaging ellipsometry study on the Ni-mediated crystallization of a-Si," J. Appl. Phys. 100, 113529 (2006)
W. Chegal, S. Kim, Y. Kwak, H. Cho, and Y Lee, "Mono-axial power spectrograph for a spectral imaging ellipsometer: design and experimental results," Meas. Sci. Technol. 14, 558-562 (2003)

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