Semi-continuous silver film templates are fabricated by focused ion beams (FIB), and surface-enhanced Raman scattering spectra from C60-fullerene deposited on these templates are recorded. Films of silver deposited by thermal evaporation are dry-etched by the ion beams with various etching times. The films tend to become semi-continuous as the etch-time increases. The Raman spectra of C60 show an increase in intensity upon correction with a silver coverage area for increasing etch-times. Increase in Raman intensity is due to the sharp edges of the FIB-etched semi-continuous templates, and the moderate enhancements are attributed to dissipation induced by gallium incorporation. A maximum enhancement factor of about 4×106 is observed, which is comparable with other experimental values. Controlling gallium incorporation during processing or by post processing treatments is being explored, which can help increase the enhancement factor.