Special Section on Nanostructured Thin Films: Fabrication, Characterization, and Application

Cathodoluminescence and photoluminescence comparative study of erbium-doped silicon-rich silicon oxide

[+] Author Affiliations
Sébastien Cueff

Université de Caen, Centre de Recherche sur les Ions, les Matériaux et la Photonique (CIMAP), ENSICAEN, CNRS, CEA/IRAMIS, 14050 CAEN cedex, France

Christophe Labbé

Université de Caen, Centre de Recherche sur les Ions, les Matériaux et la Photonique (CIMAP), ENSICAEN, CNRS, CEA/IRAMIS, 14050 CAEN cedex, France

Benjamin Dierre

National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

Julien Cardin

Université de Caen, Centre de Recherche sur les Ions, les Matériaux et la Photonique (CIMAP), ENSICAEN, CNRS, CEA/IRAMIS, 14050 CAEN cedex, France

Larysa Khomenkova

Université de Caen, Centre de Recherche sur les Ions, les Matériaux et la Photonique (CIMAP), ENSICAEN, CNRS, CEA/IRAMIS, 14050 CAEN cedex, France

Filippo Fabbri

National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

Takashi Sekiguchi

National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

Richard Rizk

Université de Caen, Centre de Recherche sur les Ions, les Matériaux et la Photonique (CIMAP), ENSICAEN, CNRS, CEA/IRAMIS, 14050 CAEN cedex, France

J. Nanophoton. 5(1), 051504 (February 04, 2011). doi:10.1117/1.3549701
History: Received October 11, 2010; Revised December 22, 2010; Accepted December 28, 2010; Published February 04, 2011; March 03, 2011
Text Size: A A A

We present a study on erbium (Er)-doped silicon (Si)-rich silicon oxide thin films grown by the magnetron cosputtering of three confocal cathodes according to the deposition temperature and the annealing treatment. It is shown that, through a careful tuning of both deposition and annealing temperatures, it is possible to engineer the fraction of agglomerated Si that may play the role of sensitizer toward Er ions. To investigate the different emitting centers present within the films according to the fraction of agglomerated Si, a cathodoluminescence experiment was made. We observe in all samples contributions from point-defect centers due to some oxygen vacancies and generally known as silicon-oxygen deficient centers (SiODC), at around 450–500 nm. The behavior of such contributions suggests the possible occurrence of an energy transfer from the SiODCs toward Er3+ ions. Photoluminescence experiments were carried out to characterize the energy transfer from Si nanoclusters toward Er3+ ions with a nonresonant wavelength (476 nm) that is unable to excite SiODCs and then exclude any role of these centers in the energy transfer process for the PL experiments. Accordingly, it is shown that structural differences have some effects on the optical properties that lead to better performance for high-temperature deposited material. This aspect is illustrated by the Er-PL efficiency that is found higher for 500°C-deposited, when compared to that for RT-deposited sample. Finally, it is shown that the Er-PL efficiency is gradually increasing as a function of the fraction of agglomerated silicon.

Figures in this Article
© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Sébastien Cueff ; Christophe Labbé ; Benjamin Dierre ; Julien Cardin ; Larysa Khomenkova, et al.
"Cathodoluminescence and photoluminescence comparative study of erbium-doped silicon-rich silicon oxide", J. Nanophoton. 5(1), 051504 (February 04, 2011). ; http://dx.doi.org/10.1117/1.3549701


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.