Special Section: Selected Papers from the First Joint Israeli-Turkish Workshop on Nanophotonics

Metal-oxide semiconductor, field effect transistor-based microscale electro-optical multimode interference modulator on a silicon chip

[+] Author Affiliations
Ofer Limon, Zeev Zalevsky

Bar-Ilan University

Luca Businaro

CNR, TASC laboratory

J. Nanophoton. 1(1), 011660 (November 15, 2007). doi:10.1117/1.2821814
History: Received June 15, 2007; Revised October 30, 2007; Accepted November 5, 2007; November 15, 2007; Online November 15, 2007
Text Size: A A A

Abstract

A new approach allows the realization of an electro-optical modulator or a transistor that is integrated on a silicon chip. The operation principle includes the realization of optical multimode interference (MMI) as the operation core of an electro-optical metal-oxide-semiconductor (MOS) field effect transistor (FET). Externally applied voltage generates a depletion region as well as layer of inversion which is full with free carriers. The free carriers vary the relative phase shift as well as the attenuation of one arm of the interferometer due to the plasma dispersion effect in silicon. This variation allows breaking the balance of the mode conversion and results with amplitude modulation in the output of the MMI region. The device does not have high finesse resonance and yet its overall length is only about 18 µm.

© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Ofer Limon ; Zeev Zalevsky and Luca Businaro
"Metal-oxide semiconductor, field effect transistor-based microscale electro-optical multimode interference modulator on a silicon chip", J. Nanophoton. 1(1), 011660 (November 15, 2007). ; http://dx.doi.org/10.1117/1.2821814


Figures

Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.