Special Section on Nanoscale Morphology to Honor Russell Messier

The nano-world of thin films

[+] Author Affiliations
Russell Messier

Department of Engineering Science and Mechanics, Pennsylvania State University, 212 Earth-Engineering Sciences Building, University Park, PA 16802-6812

J. Nanophoton. 2(1), 021995 (September 30, 2008). doi:10.1117/1.3000671
History: Received August 18, 2008; Revised September 17, 2008; Accepted September 18, 2008; September 30, 2008; Online September 30, 2008
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Abstract

Thin-film morphology---its origin at the atomic level and its evolution---has a long and rich history dating to the very first papers on thin-film deposition in the mid-1800s. I have traced this literature for films prepared under low adatom-mobility conditions and collected my thoughts on the efforts and the current status toward morphology quantification. An atomistic model of evolutionary thin film morphology, based upon atomic clustering at the nm-level, atomic self-shadowing, and competition for columnar growth, forms the backbone for these quantitative approaches. The connection between the science of morphology modeling and the technology of practical thin-film development emerged through research on sculptured thin films.

© 2008 Society of Photo-Optical Instrumentation Engineers

Topics

Thin films

Citation

Russell Messier
"The nano-world of thin films", J. Nanophoton. 2(1), 021995 (September 30, 2008). ; http://dx.doi.org/10.1117/1.3000671


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