Research Papers

Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor

[+] Author Affiliations
Xiongyeu Chew, Guangya Zhou

National University of Singapore, Department of Mechanical Engineering, 9 Engineering Drive 1, Singapore, Singapore 117576

Fook Siong Chau

National University of Singapore, Department of Mechanical Engineering, 9 Engineering Drive 1, Singapore, Singapore 117576

J. Nanophoton. 6(1), 063505 (Mar 29, 2012). doi:10.1117/1.JNP.6.063505
History: Received October 1, 2011; Revised January 26, 2012; Accepted January 30, 2012
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Abstract.  We have devised an air-suspended nano-optomechanical structure that is capable of precisely detecting in-plane motion up to a precision of subnanometer level. To achieve the detection, we utilized a basic silicon photonic building block (i.e., a nanowire waveguide directional coupler) in conjunction with nanoelectromechanical systems (NEMS). We numerically optimized the design and experimentally demonstrated a displacement sensitivity of 8.83×105V/nm1 with a low noise-level resolution of 0.172nm/Hz in a 1 Hz bandwidth centered at 950 Hz. As the waveguide coupler design does not segmentize nanowire waveguides, we eliminated the undesirable insertion losses and coupling losses irrelevant to the measurand. Furthermore the design is simple, ultracompact, and can be easily integrated with on-chip photonic systems, which may be beneficial for applications that require a compact displacement sensor with high accuracy and precision.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Xiongyeu Chew ; Guangya Zhou and Fook Siong Chau
"Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor", J. Nanophoton. 6(1), 063505 (Mar 29, 2012). ; http://dx.doi.org/10.1117/1.JNP.6.063505


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