Direct deposition of semitransparent conducting pyrolytic carbon films

Tommi Kaplas; Yuri P. Svirko

doi:10.1117/1.JNP.6.061703

5 October 2012 Direct deposition of semitransparent conducting pyrolytic carbon films

Tommi Kaplas, Yuri P. Svirko

Author Affiliations +

Journal of Nanophotonics, Vol. 6, Issue 1, 061703 (October 2012). https://doi.org/10.1117/1.JNP.6.061703

Abstract

Ultrathin pyrolytic carbon films were synthesized in a single step on dielectric substrates, using a methane-based chemical vapor deposition technique. The developed technique enables the production of wafer scale transparent conductive films suitable for applications in optics and optoelectronics.

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Tommi Kaplas and Yuri P. Svirko "Direct deposition of semitransparent conducting pyrolytic carbon films," Journal of Nanophotonics 6(1), 061703 (5 October 2012). https://doi.org/10.1117/1.JNP.6.061703

Published: 5 October 2012

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