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Special Section on Fundamental and Applied Nanoelectromagnetics

Direct deposition of semitransparent conducting pyrolytic carbon films

[+] Author Affiliations
Tommi Kaplas

University of Eastern Finland, Department of Physics and Mathematics, P.O. Box 111, FI-80101 Joensuu, Finland

Yuri Svirko

University of Eastern Finland, Department of Physics and Mathematics, P.O. Box 111, FI-80101 Joensuu, Finland

J. Nanophoton. 6(1), 061703 (Oct 05, 2012). doi:10.1117/1.JNP.6.061703
History: Received May 29, 2012; Revised July 23, 2012; Accepted August 23, 2012
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Abstract.  Ultrathin pyrolytic carbon films were synthesized in a single step on dielectric substrates, using a methane-based chemical vapor deposition technique. The developed technique enables the production of wafer scale transparent conductive films suitable for applications in optics and optoelectronics.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Tommi Kaplas and Yuri Svirko
"Direct deposition of semitransparent conducting pyrolytic carbon films", J. Nanophoton. 6(1), 061703 (Oct 05, 2012). ; http://dx.doi.org/10.1117/1.JNP.6.061703


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