Research Papers

Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides

[+] Author Affiliations
Grégory Pandraud

DIMES Technology Center—TU Delft, Feldmannweg 17, 2628 CT Delft, The Netherlands

Eduardo Margallo-Balbás

Medlumics S.L., Ronda de Poniente, 16-1E, 28760 Tres Cantos (Madrid), Spain

Pasqualina M. Sarro

Technology and Materials (ECTM)—TU Delft, Electonic Component, Feldmannweg 17, 2628 CT Delft, The Netherlands

J. Nanophoton. 6(1), 063530 (Nov 22, 2012). doi:10.1117/1.JNP.6.063530
History: Received July 4, 2012; Revised October 25, 2012; Accepted October 25, 2012
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Abstract.  We have studied, for the first time, the sensing capabilities of plasma-enhanced chemical vapor deposition (PECVD) SiC-SiO2-SiC horizontal slot waveguides. Optical propagation losses were measured to be 23.9dB/cm for the quasi-transverse magnetic mode. To assess the potential of this device as a sensor, we simulated the confinement factor in the slot. This simulation revealed that SiC-based slot waveguides can be used, advantangeously, for sensing as the confinement strongly varies with the refractive index of the slot material. A confinement factor change of 0.15/refractive index units was measured for different slot materials.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Grégory Pandraud ; Eduardo Margallo-Balbás and Pasqualina M. Sarro
"Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides", J. Nanophoton. 6(1), 063530 (Nov 22, 2012). ; http://dx.doi.org/10.1117/1.JNP.6.063530


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