Research Papers

Ultra-short-pulsed laser-machined nanogratings of laser-induced periodic surface structures on thin molybdenum layers

[+] Author Affiliations
Davide Scorticati

University of Twente, Faculty of Engineering Technology, 7500AE Enschede, Netherlands

Gert-Willem Römer

University of Twente, Faculty of Engineering Technology, 7500AE Enschede, Netherlands

Dirk Frederik de Lange

TNO Technical Sciences, Mechatronics, Mechanics and Materials, 5600AE Eindhoven, Netherlands

Bert Huis in ’t Veld

University of Twente, Faculty of Engineering Technology, 7500AE Enschede, Netherlands

Universidad Autónoma de San Luis Potosí, Facultad de Ingeniería, México

J. Nanophoton. 6(1), 063528 (Dec 03, 2012). doi:10.1117/1.JNP.6.063528
History: Received June 20, 2012; Revised November 6, 2012; Accepted November 6, 2012
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Abstract.  Large areas of regular diffraction nanogratings were produced consisting of so-called laser-induced periodic surface structures (LIPSS) on thin molybdenum layers (<400nm) deposited on a borosilicate glass substrate. The aim was to produce these structures without ablating nor cracking the molybdenum layer. Ultra short laser pulses were applied using a focused Gaussian beam profile. Processing parameters such as laser fluence, pulse overlap, number of overscans, repetition frequency, wavelength and polarization were varied to study the effect on periodicity, height, and especially regularity of the obtained LIPSS. It was found that a careful choice of the correct laser parameters is required to avoid detrimental mechanical stresses, cracking, and delamination during the laser processing of the layer in order to remain in its correct range of ductility as well as to ensure regular LIPSS. A possible photovoltaic application of these nanogratings could be found in texturing of thin film cells to enhance light trapping mechanisms.

Figures in this Article
© 2012 Society of Photo-Optical Instrumentation Engineers

Topics

Lasers ; Molybdenum

Citation

Davide Scorticati ; Gert-Willem Römer ; Dirk Frederik de Lange and Bert Huis in ’t Veld
"Ultra-short-pulsed laser-machined nanogratings of laser-induced periodic surface structures on thin molybdenum layers", J. Nanophoton. 6(1), 063528 (Dec 03, 2012). ; http://dx.doi.org/10.1117/1.JNP.6.063528


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