Special Section on Metamaterials and Photonic Nanostructures

Fabrication of large-area two-dimensional array of air holes with different hole shapes for optical and terahertz wavelength regions

[+] Author Affiliations
Raj Patil

Tata Institute of Fundamental Research, Department of Condensed Matter Physics and Material Science, Homi Bhabha Road, Mumbai 400005, India

Sheng Lan

South China Normal University, School of Information and Optoelectronic Science and Engineering, Laboratory of Nanophotonic Functional Materials and Devices, Guangzhou 510006, China

Achanta Venu Gopal

Tata Institute of Fundamental Research, Department of Condensed Matter Physics and Material Science, Homi Bhabha Road, Mumbai 400005, India

J. Nanophoton. 8(1), 083896 (Jan 21, 2014). doi:10.1117/1.JNP.8.083896
History: Received October 5, 2013; Revised November 25, 2013; Accepted December 10, 2013
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Abstract.  Fabrication of metal-dielectric nanostructures with subwavelength precision is necessary for plasmon-mediated novel applications. Electron beam lithography (EBL) offers such precision, but for shapes other than circles, squares, and lines, process optimization is required. The EBL and dry etching processes are optimized for subwavelength precision in large area arrays of air groove patterns in gold film in two different length scales. We fabricated one structure for optical frequencies with an asymmetric, nonstandard element having a minimum feature size of about 50 nm and another for terahertz wavelength region with a large aspect ratio of about 975.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Topics

Fabrication ; Gold ; Metals

Citation

Raj Patil ; Sheng Lan and Achanta Venu Gopal
"Fabrication of large-area two-dimensional array of air holes with different hole shapes for optical and terahertz wavelength regions", J. Nanophoton. 8(1), 083896 (Jan 21, 2014). ; http://dx.doi.org/10.1117/1.JNP.8.083896


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