Research Papers

Plane demagnifying nanolithography by hybrid hyperlens–superlens structure

[+] Author Affiliations
Gaofeng Liang

University of Electronic Science and Technology of China, School of Physical Electronics, Chengdu 610054, China

Chinese Academy of Sciences, Institute of Optics and Electronics, State Key Lab of Optical Technologies on Nano-fabrication and Micro-engineering, Chengdu 610209, China

Zeyu Zhao, Na Yao, Changtao Wang, Xiangang Luo

Chinese Academy of Sciences, Institute of Optics and Electronics, State Key Lab of Optical Technologies on Nano-fabrication and Micro-engineering, Chengdu 610209, China

Bo Jiang

No. 33 Research Institute of China Electronics Technology Group Corporation, Taiyuan 030006, China

Qing Zhao

University of Electronic Science and Technology of China, School of Physical Electronics, Chengdu 610054, China

J. Nanophoton. 8(1), 083080 (Jul 10, 2014). doi:10.1117/1.JNP.8.083080
History: Received March 14, 2014; Revised June 3, 2014; Accepted June 5, 2014
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Abstract.  We propose a hybrid hyperlens–superlens structure to achieve demagnifying nanolithography. It consists of a core of planar superlens and a shell of cylinder hyperlens. In the nanolithography process, the shell of the cylinder hyperlens could demagnify the mask patterns to the interior cylinder interface, and then the core of the planar superlens transmits the demagnified patterns to the planar output photoresist layer. The performance of this hybrid hyperlens–superlens structure is analyzed for different periods and spacing of mask and demagnification factors. The numerical simulation results agree well with the theory. It is demonstrated that the hybrid structure could be used as a superresolution device for plane demagnifying nanolithography.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Gaofeng Liang ; Zeyu Zhao ; Na Yao ; Changtao Wang ; Bo Jiang, et al.
"Plane demagnifying nanolithography by hybrid hyperlens–superlens structure", J. Nanophoton. 8(1), 083080 (Jul 10, 2014). ; http://dx.doi.org/10.1117/1.JNP.8.083080


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