Special Section on Nanophotonic Materials and Devices

Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications

[+] Author Affiliations
Chong Pei Ho

National University of Singapore, Department of Electrical and Computer Engineering, Singapore 117576, Singapore

Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 117685, Singapore

Prakash Pitchappa

National University of Singapore, Department of Electrical and Computer Engineering, Singapore 117576, Singapore

Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 117685, Singapore

Piotr Kropelnicki

Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 117685, Singapore

Jian Wang

Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 117685, Singapore

Hong Cai

Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 117685, Singapore

Yuandong Gu

Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 117685, Singapore

Chengkuo Lee

National University of Singapore, Department of Electrical and Computer Engineering, Singapore 117576, Singapore

J. Nanophoton. 8(1), 084096 (Jul 15, 2014). doi:10.1117/1.JNP.8.084096
History: Received March 7, 2014; Revised April 27, 2014; Accepted June 23, 2014
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Abstract.  We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured at room temperature. Characterization is also done at 450°C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174nm/°C and the thermo-optic coefficient is calculated to be +1.70×104K1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Chong Pei Ho ; Prakash Pitchappa ; Piotr Kropelnicki ; Jian Wang ; Hong Cai, et al.
"Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications", J. Nanophoton. 8(1), 084096 (Jul 15, 2014). ; http://dx.doi.org/10.1117/1.JNP.8.084096


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