Special Section on Nanostructured Thin Films: Evolving Perspectives

Tunable stoichiometry of SiOx-BaTiOy-BOz fabricated by multitarget pulsed laser deposition

[+] Author Affiliations
John G. Jones, Jonathan T. Goldstein, Neil R. Murphy, Rachel Jakubiak, Charles E. Stutz

Air Force Research Laboratory, Materials and Manufacturing Directorate, AFRL/RXAN, 2179 12th Street, Wright-Patterson AFB, Ohio 45433, United States

Steven R. Smith, Gerald R. Landis, Lawrence Grazulis

University of Dayton Research Institute, 300 College Park, Dayton, Ohio 45469, United States

Lirong Sun

General Dynamics Information Technology, 5100 Springfield Road, Dayton, Ohio 45431, United States

Gregory Kozlowski

Wright State University, Department of Physics, 3640 Colonel Glenn Highway, Dayton, Ohio 45435, United States

J. Nanophoton. 9(1), 093590 (Aug 05, 2015). doi:10.1117/1.JNP.9.093590
History: Received November 1, 2014; Accepted July 1, 2015
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Abstract.  Oxide materials of desired stoichiometry are challenging to make in small quantities. Nanostructured thin films of multiple oxide materials were obtained by using pulsed laser deposition and multiple independent targets consisting of Si, BaTiO3, and B. Programmable stoichiometry of nanostructured thin films was achieved by synchronizing a 248-nm krypton fluoride excimer laser at an energy of 300mJ/pulse, a galvanometer mirror system, and the three independent target materials with a background pressure of oxygen. Island growth occurred on a per pulse basis; some 500 pulses are required to deposit 1 nm of material. The number of pulses on each target was programmed with a high degree of precision. Trends in material properties were systematically identified by varying the stoichiometry of multiple nanostructured thin films and comparing the resulting properties measured using in situ spectroscopic ellipsometry, capacitance measurements including relative permittivity and loss, and energy dispersive spectroscopy (EDS). Films were deposited 150 to 907 nm thickness, and in situ ellipsometry data were modeled to calculate thickness n and k. A representative atomic force microscopy measurement was also collected. EDS, ellipsometry, and capacitance measurements were all performed on each of the samples, with one sample having a calculated permittivity greater than 20,000 at 1 kHz.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

John G. Jones ; Jonathan T. Goldstein ; Steven R. Smith ; Gerald R. Landis ; Lawrence Grazulis, et al.
"Tunable stoichiometry of SiOx-BaTiOy-BOz fabricated by multitarget pulsed laser deposition", J. Nanophoton. 9(1), 093590 (Aug 05, 2015). ; http://dx.doi.org/10.1117/1.JNP.9.093590


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