Designing a scanning probe microscope for in situ study of carbon materials growth processes during chemical vapor deposition

Artem Borisovich Loginov; Rinat Ramilovich Ismagilov

doi:10.1117/1.JNP.11.032509

10 February 2017 Designing a scanning probe microscope for in situ study of carbon materials growth processes during chemical vapor deposition

Artem Borisovich Loginov, Rinat Ramilovich Ismagilov

Author Affiliations +

Journal of Nanophotonics, Vol. 11, Issue 3, 032509 (February 2017). https://doi.org/10.1117/1.JNP.11.032509

Abstract

The development of methods for in situ analysis is required to provide deeper understanding of carbon film materials formation during chemical vapor deposition (CVD). Here, we describe scanning probe microscope instrument designed for study of nucleation and growth of thin film materials obtained by carbon condensation from a hydrogen/methane gas mixture activated by the “hot filament” method. The microscope allows measurements of topology characteristics, width of band gap, Fermi level position, and electrical conductivity of the carbon film material during its formation in the CVD process. We present the design and the characteristics of the microscope in this paper.

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Artem Borisovich Loginov and Rinat Ramilovich Ismagilov "Designing a scanning probe microscope for in situ study of carbon materials growth processes during chemical vapor deposition," Journal of Nanophotonics 11(3), 032509 (10 February 2017). https://doi.org/10.1117/1.JNP.11.032509

Received: 15 November 2016; Accepted: 24 January 2017; Published: 10 February 2017

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