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We present a scalable method for producing all-glass meta-surfaces with high mechanical stability and robust resistance to laser-induced damage. The process is based on dewetting a thin metal film on a glass substrate, followed by dry etching and metal mask removal. Laser scan is used to pattern the spatial pattern of the end-result metasurface. We will present process advances which enable formation of lenses, antireflection surfaces, and birefringence elements.
Eyal Feigenbaum
"Laser-controlled patterning for scalable and durable all-glass metasurface for lensing, antireflection, and birefringence", Proc. SPIE PC12939, High-Power Laser Ablation VIII, PC1293910 (11 April 2024); https://doi.org/10.1117/12.3013927
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Eyal Feigenbaum, "Laser-controlled patterning for scalable and durable all-glass metasurface for lensing, antireflection, and birefringence," Proc. SPIE PC12939, High-Power Laser Ablation VIII, PC1293910 (11 April 2024); https://doi.org/10.1117/12.3013927