Paper
28 November 1983 Effect Of Roughness On The Selectivity Of Absorbing Surfaces : Application To "Black" Molybdenum Prepared By CVD
A. Donnadieu, H. Ezbakhe
Author Affiliations +
Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935539
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland
Abstract
The study of optical characteristics of "Black" molybdenum films shows that the thickness of thin films and the texture of the substrate surface have a great influence on the selectivity of the absorbing surfaces. The conjugation of the effects of the two parameters permits to enhance the selectivity of the stacks. The results are interpreted in term of an application of the approximated electromagnetic model of Beckman.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Donnadieu and H. Ezbakhe "Effect Of Roughness On The Selectivity Of Absorbing Surfaces : Application To "Black" Molybdenum Prepared By CVD", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935539
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KEYWORDS
Molybdenum

Reflectivity

Thin films

Fused quartz

Surface finishing

Chemical vapor deposition

Statistical modeling

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