Interpretation Of Wide Band Scans Of Growing Optical Thin Films In Terms Of Layer Microstructure

F. Flory; B. Schmitt; E. Pelletier; H. A. Macleod

doi:10.1117/12.935509

28 November 1983 Interpretation Of Wide Band Scans Of Growing Optical Thin Films In Terms Of Layer Microstructure

F. Flory, B. Schmitt, E. Pelletier, H. A. Macleod

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935509
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

A system which includes a wide-band scanning monochromator has been developed for the monitoring of the deposition of optical thin film coatings. This instrument measures the transmittance of the growing films over the spectral region 400 to 1100 nm. The monochromator uses a flat-field holographic concave grating in conjunction with an array of electronically-scanned photodiodes to measure the spectral characteristics of the films over the entire region once every 0.2 second. The data from the scans are used in the measurement and control of film thickness during deposition, but are also recorded on floppy disks so that they can be analysed afterwards, and they are now being used in the study of the behaviour of optical thin films during deposition. From these results it should be possible to calculate the profile of refractive index throughout each film yielding useful information on film structure. Methods which are used for this calculation involve as a first step the identification and measurement of extrema in the transmittance records for each wavelength permitting the calculation of the effective indices between these extrema and the eventual derivation of the refractive index profile of the films as a function of wavelength. Results which have so far been obtained for zinc sulphide are consistent with measurements of the refractive index profile made by other workers at single wavelengths, and therefore give additional support to the currently accepted models of zinc sulphide microstructure.

Citation Download Citation

F. Flory, B. Schmitt, E. Pelletier, and H. A. Macleod "Interpretation Of Wide Band Scans Of Growing Optical Thin Films In Terms Of Layer Microstructure", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935509

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