Paper
22 February 2018 A MEMS-driven Hadamard transform spectrometer
Author Affiliations +
Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450X (2018) https://doi.org/10.1117/12.2292808
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
We report a miniaturized spectrometer based on Hadamard transformation. The compact spectrometer utilizes a single-pixel photodetector and thus can operate at any wavelengths at relatively low cost. The spectrometer utilizes a MEMS-driven moving mask to encode the light intensity at its imaging slit, and the encoded light is then collected by a single-pixel detector. The light spectrum is recovered through an inverse Hadamard transform after a complete set of encoding is measured and recorded. The spectrometer is experimentally demonstrated with a spectral resolution better than 3 nm covering the full visible spectrum from 400 nm to 700 nm, and is capable of measuring over 200 spectra per second.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu Du and Guangya Zhou "A MEMS-driven Hadamard transform spectrometer", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450X (22 February 2018); https://doi.org/10.1117/12.2292808
Lens.org Logo
CITATIONS
Cited by 6 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Microelectromechanical systems

Computer programming

Spectroscopy

FT-IR spectroscopy

Photodetectors

Sensors

Infrared spectroscopy

Back to Top