Paper
18 March 2019 Bottom to in-plane grating coupler with high coupling efficiency and directionality
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Abstract
Here, we have presented the first design of a bottom to in-plane grating coupler with a high coupling efficiency and directionality. The grating coupler consists of a high contrast grating (HCG) and an etched silicon-on-insulator (SOI) grating device. The final coupling efficiency is 82.2% at 1.55µm, with a 57nm 3dB bandwidth, and the directionality is 14:1 (left to right ratio). This grating coupler can be further optimized with different low index materials. This grating coupler could work as the vertical to in-plane coupler for the label free silicon photonic bio-sensor.
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Yixin Chen , Bin Ai , Elham Heidari, Bonnie J. Dunbar, Volker J. Sorger, Zi Jing Wong, Ray T. Chen, and Hamed Dalir "Bottom to in-plane grating coupler with high coupling efficiency and directionality", Proc. SPIE 10917, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII, 109171X (18 March 2019); https://doi.org/10.1117/12.2510839
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KEYWORDS
Diffraction gratings

Etching

Geometrical optics

Optical design

Silicon

Diffraction

Fiber couplers

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