Mechanical deformation on nanoparticle-based thin-film transistors

Fábio F. Vidor; Thorsten Meyers; Julia Reker; Kathrin Müller; Gilson I. Wirth; Ulrich Hilleringmann

doi:10.1117/12.2502393

24 January 2019 Mechanical deformation on nanoparticle-based thin-film transistors

Fábio F. Vidor, Thorsten Meyers, Julia Reker, Kathrin Müller, Gilson I. Wirth, Ulrich Hilleringmann

Proceedings Volume 11043, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems; 1104315 (2019) https://doi.org/10.1117/12.2502393
Event: Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 2018, Skukuza, South Africa

Abstract

Thin-film transistors (TFTs) are the pivotal elements driving electrical current in innovative systems. These applications emerge adding new functionalities to every-day products; therefore, new challenges are faced. Electric components in flexible displays, RFID tags, or electronics skin for health monitoring are subjected to a high degree of mechanical deformation. Nonetheless, the systems have to operate properly despite external influences. In this study, a brief review of the mechanical deformation on the electrical characteristics of nanoparticle-based TFTs is presented Conjointly, a case-of-study considering low-cost ZnO nanoparticle-based TFTs on PET substrate is analyzed. The TFTs were integrated on a freestanding substrate replicating a more realistic scenario for a later large-scale production. Fabrication steps with a maximum temperature of 120°C were employed availing the integration process to a wider range of substrates. As gate dielectric, a spin-on highk nanocomposite was selected in order to favor the mechanical stability of the layer as well as its permittivity. Moreover, the integration routine was adapted in order to reduce parasitic overlapping capacitances in the transistors. The TFTs were electrically characterized either in a flat state or under mechanical deformation, employing different bending directions as well as deformations parallel or perpendicular to the transistor channel.

Citation Download Citation

Fábio F. Vidor, Thorsten Meyers, Julia Reker, Kathrin Müller, Gilson I. Wirth, and Ulrich Hilleringmann "Mechanical deformation on nanoparticle-based thin-film transistors", Proc. SPIE 11043, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 1104315 (24 January 2019); https://doi.org/10.1117/12.2502393

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available