Paper
14 February 2019 Refractive index insensitive temperature sensor based on a photonic crystal nanobeam cavity
Xuepei Li, Chao Wang, Zheng Wang, Zhongyuan Fu, Fujun Sun, Huiping Tian
Author Affiliations +
Proceedings Volume 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018); 110484F (2019) https://doi.org/10.1117/12.2522602
Event: 17th International Conference on Optical Communications and Networks (ICOCN2018), 2018, Zhuhai, China
Abstract
We present an ambient refractive index (RI) insensitive temperature sensor based on a Silicon-on-Insulator (SOI) ellipse stack major axis modulated photonic crystal (PC) nanobeam cavity (EPCNC). The PC nanobeam cavity is covered with SU-8 cladding to increase the temperature sensitivity by taking advantage of the relatively high thermooptic (TO) coefficient of SU-8 cladding. Three dimensional finite-difference time-domain (3D-FDTD) simulations are used for our analysis. The results show that the sensitivity of temperature sensing is -108.9pm/K. In particular, the proposed sensor not only achieves a competitive temperature sensitivity, but also eliminates the influence of ambient RI on sensing. Therefore, the proposed sensor is potentially a promising platform for future application of temperature sensing.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuepei Li, Chao Wang, Zheng Wang, Zhongyuan Fu, Fujun Sun, and Huiping Tian "Refractive index insensitive temperature sensor based on a photonic crystal nanobeam cavity", Proc. SPIE 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018), 110484F (14 February 2019); https://doi.org/10.1117/12.2522602
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KEYWORDS
Sensors

Cladding

Photonic crystals

Temperature sensors

Silicon

Refractive index

Silica

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