Paper
8 July 2019 Study on preparation process and shielding effectiveness of graphene films
Author Affiliations +
Proceedings Volume 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019); 1106414 (2019) https://doi.org/10.1117/12.2539758
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China
Abstract
In order to improve the shielding effectiveness of graphene films, graphene films were prepared by chemical vapor deposition. The effects of hydrogen flow rate, methane flow rate, reaction temperature and reaction time on the electromagnetic shielding properties of the films were investigated. The shielding effectiveness of the film was tested and the preparation process of the film was optimized based on the test results. The results show that when the hydrogen flow rate is 8sccm, the methane flow rate is 15sccm, the reaction temperature is 1030°C, and the reaction time is 30minutes, the shielding effectiveness of the film is 1.2dB (0.3-3000MHz) and the average transmittance is 96%. (400-800nm), the photoelectric comprehensive performance is better.
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Jianle Zhao, Junhong Su, Kai Shi, Xin Zhou, and Rongrong Yan "Study on preparation process and shielding effectiveness of graphene films", Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 1106414 (8 July 2019); https://doi.org/10.1117/12.2539758
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KEYWORDS
Graphene

Methane

Transmittance

Carbon

Copper

Chemical species

Chemical vapor deposition

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