The effect of deposition process parameters on thin film coatings for the Athena X-ray optics

S. Massahi; D. Ferreira; F. Christensen; N. Gellert; S. Svendsen; P. Henriksen; A. 'S Jegers; M. Collon; B. Landgraf; D. Girou; A. Thete; B. Shortt; I. Ferreira; M. Bavdaz; W. Schönberger; A. Langer

doi:10.1117/12.2594422

23 August 2021 The effect of deposition process parameters on thin film coatings for the Athena X-ray optics

S. Massahi, D. Ferreira, F. Christensen, N. Gellert, S. Svendsen, P. Henriksen, A. 'S Jegers, M. Collon, B. Landgraf, D. Girou, A. Thete, B. Shortt, I. Ferreira, M. Bavdaz, W. Schönberger, A. Langer

Author Affiliations +

Proceedings Volume 11822, Optics for EUV, X-Ray, and Gamma-Ray Astronomy X; 118220B (2021) https://doi.org/10.1117/12.2594422
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

The thin film coating technology for the European Space Agency mission, Advanced Telescope for High-Energy Astrophysics (Athena) has been established. The X-ray optics of the Athena telescope is based on Silicon Pore Optics (SPO) technology which is enhanced by the thin film coatings deposited on the reflective surface of the SPO plates. In this work, we present a literature study of the coating process parameter space and provide an overview of the thin film properties with a focus on micro roughness, chemical composition and wear resistance when deposited under various process conditions. We determined, that the thin film density depends strongly on the mobility of the adatoms on the substrate surface. Some coating process parameters, which have a significant impact on the adatom mobility are the discharge voltage, the working gas pressure and the substrate temperature.

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S. Massahi, D. Ferreira, F. Christensen, N. Gellert, S. Svendsen, P. Henriksen, A. 'S Jegers, M. Collon, B. Landgraf, D. Girou, A. Thete, B. Shortt, I. Ferreira, M. Bavdaz, W. Schönberger, and A. Langer "The effect of deposition process parameters on thin film coatings for the Athena X-ray optics", Proc. SPIE 11822, Optics for EUV, X-Ray, and Gamma-Ray Astronomy X, 118220B (23 August 2021); https://doi.org/10.1117/12.2594422

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