Synthesis of silicon-based dielectric films by excimer laser ablation

Eric Fogarassy; Claude Fuchs; Adelilah Slaoui; Salome de Unamuno; Jean-Paul Stoquert; Vladimir I. Marine; Bernard Lang

doi:10.1117/12.167554

1 February 1994 Synthesis of silicon-based dielectric films by excimer laser ablation

Eric Fogarassy, Claude Fuchs, Adelilah Slaoui, Salome de Unamuno, Jean-Paul Stoquert, Vladimir I. Marine, Bernard Lang

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167554
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

Silicon oxide, oxynitride and nitride films are deposited at low temperature (<EQ 450 degree(s)C) by pulsed ArF excimer laser ablation from silicon, silicon monoxide, fused silica and silicon nitride targets, performed under vacuum and in oxygen atmosphere. We investigate in this paper the specific influence of laser fluence, target materials, substrate temperature and oxygen pressure on the composition and final properties of SiO_xN_y grown layers. The process conditions are optimized in order to deposit good quality silicon oxide and silicon nitride thin films.

Citation Download Citation

Eric Fogarassy, Claude Fuchs, Adelilah Slaoui, Salome de Unamuno, Jean-Paul Stoquert, Vladimir I. Marine, and Bernard Lang "Synthesis of silicon-based dielectric films by excimer laser ablation", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167554

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available