Ion-assisted deposition of nontoxic coatings for high-power CO2 laser optics

A. Schnellbuegel; Harro Hagedorn; Rainer Anton

doi:10.1117/12.192160

4 November 1994 Ion-assisted deposition of nontoxic coatings for high-power CO₂ laser optics

A. Schnellbuegel, Harro Hagedorn, Rainer Anton

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192160
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Rare earth fluorides have been investigated as possible coating materials for carbon dioxide laser optic components. AR and PR coatings on ZnSe substrates were produced by means of ion assisted deposition (IAD) of YF₃ and YbF₃. Optics with total absorption of about 0.1% and with damage thresholds of up to 30 J/cm² were produced. Effects of IAD on stoichiometry and chemical state of the rare earth ions have been examined by x-ray photoelectron spectroscopy (XPS). In-situ XPS revealed that ion bombardment, as used in IAD, and sputter cleaning result in fluorine deficient films. Oxygen incorporation during preparation could be kept below 1 - 5at%.

Citation Download Citation

A. Schnellbuegel, Harro Hagedorn, and Rainer Anton "Ion-assisted deposition of nontoxic coatings for high-power CO₂ laser optics", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192160

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