Surface topography restitution for rough thin film deposits

Antoine Llebaria; F. Abdellani; Monique Rasigni; Georges Rasigni

doi:10.1117/12.192141

4 November 1994 Surface topography restitution for rough thin film deposits

Antoine Llebaria, F. Abdellani, Monique Rasigni, Georges Rasigni

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192141
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

A classic method for studying surface roughness of thin films that uses a microdensitometer analysis of electron micrographies of surface replica is revised and some defects are revealed. Two new methods are proposed. The first is based on multiresolution analysis, the second implements Wiener filtering by 2D Fourier Transform. The results are used to check the surface normality by means of statistical tests.

Citation Download Citation

Antoine Llebaria, F. Abdellani, Monique Rasigni, and Georges Rasigni "Surface topography restitution for rough thin film deposits", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192141

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