Active interference filters using silicon-compatible materials

D. P. Poenar; Patrick J. French; Reinoud F. Wolffenbuttel

doi:10.1117/12.220939

13 September 1995 Active interference filters using silicon-compatible materials

D. P. Poenar, Patrick J. French, Reinoud F. Wolffenbuttel

Proceedings Volume 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications; (1995) https://doi.org/10.1117/12.220939
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

The basic aim of this work is to obtain optical detectors with a spectral response programmable by design using the combined response of polysilicon and monocrystalline silicon photodiodes. Such an approach is needed in order to obtain a color sensor with improved flexibility and control of its characteristic parameters. In order to achieve this aim, the potential of different multilayer thin film light detectors has been evaluated. The results show that polysilicon diodes can be realized and used as light detectors and a simple test structure has been fabricated in order to demonstrate the possiblity of implementing thin film color detecting structures.

Citation Download Citation

D. P. Poenar, Patrick J. French, and Reinoud F. Wolffenbuttel "Active interference filters using silicon-compatible materials", Proc. SPIE 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, (13 September 1995); https://doi.org/10.1117/12.220939

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available