Residual stress, composition, and optical properties of SiOxNy thin films deposited by dual ion beam sputtering

Jean-Yves Robic; Herve Leplan; M. Berger; Patrick Chaton; Etienne Quesnel; Oliver Lartigue; Catherine Pelle; Y. Pauleau; F. Pierre

doi:10.1117/12.246826

19 August 1996 Residual stress, composition, and optical properties of SiO_xN_y thin films deposited by dual ion beam sputtering

Jean-Yves Robic, Herve Leplan, M. Berger, Patrick Chaton, Etienne Quesnel, Oliver Lartigue, Catherine Pelle, Y. Pauleau, F. Pierre

Author Affiliations +

Proceedings Volume 2776, Developments in Optical Component Coatings; (1996) https://doi.org/10.1117/12.246826
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Silicon oxynitride thin films were deposited on various substrates by dual ion beam sputtering from a silicon target in an argon oxygen nitrogen mixture. The composition and density of the films were deduced from Rutherford backscattering spectroscopy and nuclear reaction analyses. The residual stress was determined by measurements of the radius of curvature of the silicon substrates. The refractive index, extinction coefficient, composition and residual stress were investigated as a function of oxygen flow rate and deposition rate. The composition of the deposited materials was found to vary from Si₃N₄ to SiO₂ with increasing oxygen flow rate. The resulting films were dense, stable and insensitive to ambient moisture. A strong correlation between the compressive residual stress and the nitrogen content of the films was established. The origin of residual stress and its evolution with deposition parameters and composition of the films are discussed.

Citation Download Citation

Jean-Yves Robic, Herve Leplan, M. Berger, Patrick Chaton, Etienne Quesnel, Oliver Lartigue, Catherine Pelle, Y. Pauleau, and F. Pierre "Residual stress, composition, and optical properties of SiO_xN_y thin films deposited by dual ion beam sputtering", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246826

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available