Grating-based surface-normal optoelectronic interconnects on Si substrate

Feiming Li; Michael Dubinovsky; Oleg A. Ershov; Linghui Wu; Ting Li; Suning Tang; Ray T. Chen

doi:10.1117/12.250925

13 September 1996 Grating-based surface-normal optoelectronic interconnects on Si substrate

Feiming Li, Michael Dubinovsky, Oleg A. Ershov, Linghui Wu, Ting Li, Suning Tang, Ray T. Chen

Proceedings Volume 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III; (1996) https://doi.org/10.1117/12.250925
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

We report in this paper the surface-normal input and output grating couplers for 1-to-many fanouts aiming at optical clock signal distribution application. For wafer-scale interconnects, surface-relief polygonal gratings with a 1 micrometer period (0.5 micrometer feature size) were fabricated using reactive ion beam etching (RIE). Surface- normal input and output coupling schemes were carried out with a combined coupling efficiency of 65%. Employment of substrate modes in silicon greatly releases the required grating spacing for the demonstrated two-way surface-normal coupling. Seven and five-tenths GHz 1-to-4 clock signal distribution operating at 1.3 micrometer was demonstrated with a signal to noise ratio as high as 60 dB. Generalization of 1-to-many fanout can be realized by implementing a polygonal grating with an equivalent number of facets. For board level optical clock signal distribution system, a preliminary result using a parallelogramic grating to couple surface-normal input light into polyimide waveguide is also reported.

Citation Download Citation

Feiming Li, Michael Dubinovsky, Oleg A. Ershov, Linghui Wu, Ting Li, Suning Tang, and Ray T. Chen "Grating-based surface-normal optoelectronic interconnects on Si substrate", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); https://doi.org/10.1117/12.250925

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