Formation of hollow microcylinders from sputtered erbium-doped glass films

Madhu Krishnaswamy; James N. McMullin; B.P. Keyworth; James N. Broughton

doi:10.1117/12.271147

2 May 1997 Formation of hollow microcylinders from sputtered erbium-doped glass films

Madhu Krishnaswamy, James N. McMullin, B.P. Keyworth, James N. Broughton

Proceedings Volume 2996, Rare-Earth-Doped Devices; (1997) https://doi.org/10.1117/12.271147
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

A planar sputter-deposited erbium-doped glass ridge was re- shaped into a hollow microcylinder using only photolithography, wet-etching and annealing. It is believed that selective build-up of gas is primarily responsible for this phenomenon, which is similar to glass-blowing. Other factors, such as the width and depth of the original ridge, the adhesion of the ridge to the underlying surface and the duration of the anneal, influence the eventual shape of the hollow microcylinder. By varying the processing parameters, a wide range of microcylinder shapes and sizes were obtained: circular and semi-circular profiles with 9.0 micrometers diameter or flatter 'tunnel-shaped' profiles ranging u pt o 25 micrometers in height and 100 micrometers in width. Microcylinders up to 1 cm long were fabricated. Water was sen to enter these hollow devices through capillary action. He-Ne light propagation through the hollow portion of the device was observed. These observations confirm that the microcylinders are hollow over their entire length. Hollow microcylinders or microchannels may find application in microfluidics and micro-optics.

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Madhu Krishnaswamy, James N. McMullin, B.P. Keyworth, and James N. Broughton "Formation of hollow microcylinders from sputtered erbium-doped glass films", Proc. SPIE 2996, Rare-Earth-Doped Devices, (2 May 1997); https://doi.org/10.1117/12.271147

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KEYWORDS

Glasses

Scanning electron microscopy

Etching

Annealing

Microfluidics

Oxides

Semiconducting wafers

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