UV and VUV efficient excilamps

Victor F. Tarasenko; Mikhail I. Lomaev; Alexei N. Panchenko; Victor S. Skakun; Edward A. Sosnin

doi:10.1117/12.321558

14 September 1998 UV and VUV efficient excilamps

Victor F. Tarasenko, Mikhail I. Lomaev, Alexei N. Panchenko, Victor S. Skakun, Edward A. Sosnin

Proceedings Volume 3343, High-Power Laser Ablation; (1998) https://doi.org/10.1117/12.321558
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States

Abstract

Operating parameters of powerful excilamps with different discharge geometry pumped by glow discharges, high-pressure volume discharge with UV-preionization and barrier discharge are presented. Intense radiation of Ar₂*, Kr₂*, Xe₂*, ArF*, KrBr*, Cl₂, KrCl*, KrF*, XeI*, XeBr*, XeCl*, XeF*, I₂ and IBR molecules was obtained in rare gas or in rare gas -- F₂ (CH₃Br, Cl₂, HCl, I₂, NF₃) mixtures. Excilamps with high spatial uniformity of the output, narrow emission line and high gas life-time were developed. It was shown that efficiency of luminescence of exciplex molecules KrCl* of about 30% can be obtained in high- voltage glow discharge and positive column of glow discharge. Output at (lambda) approximately 222 and 308 nm up to 200 W from single excilamp and 500 W from three excilamps operating in parallel was demonstrated. It was shown that the efficiency of barrier discharge excilamps pumped by sinusoidal pulses several tens microseconds in duration can be sufficiently improved.

Citation Download Citation

Victor F. Tarasenko, Mikhail I. Lomaev, Alexei N. Panchenko, Victor S. Skakun, and Edward A. Sosnin "UV and VUV efficient excilamps", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); https://doi.org/10.1117/12.321558

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