Synthesis of carbon nitride films by arc-heated atomic nitrogen beams assisted pulsed laser ablation

Ning Xu; Yuancheng Du; Zhifeng Ying; Zhongmin Ren; Fuming Li

doi:10.1117/12.317911

15 August 1998 Synthesis of carbon nitride films by arc-heated atomic nitrogen beams assisted pulsed laser ablation

Ning Xu, Yuancheng Du, Zhifeng Ying, Zhongmin Ren, Fuming Li

Proceedings Volume 3550, Laser Processing of Materials and Industrial Applications II; (1998) https://doi.org/10.1117/12.317911
Event: Photonics China '98, 1998, Beijing, China

Abstract

Carbon nitride films were synthesized by active atomic nitrogen beams intersecting pulsed laser plumes at the substrates without heating. The properties of the films were studied by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and Raman spectroscopy. AES and XPS analysis show that the as- deposited carbon nitride films are mainly composed of [N] and [C], and the composition ratios ([N]/[C]) increase as the pulsed laser repetition rate and energy. XRD results show that several diffraction peaks attributed to (beta) -C₃N₄ phase were identified. Raman spectra show that several prominent bands related to C-N bondings could be observed.

Citation Download Citation

Ning Xu, Yuancheng Du, Zhifeng Ying, Zhongmin Ren, and Fuming Li "Synthesis of carbon nitride films by arc-heated atomic nitrogen beams assisted pulsed laser ablation", Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); https://doi.org/10.1117/12.317911

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