Optical methods for surface characterization

Ivan Ohlidal

doi:10.1117/12.353096

14 July 1999 Optical methods for surface characterization

Ivan Ohlidal

Proceedings Volume 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; (1999) https://doi.org/10.1117/12.353096
Event: Eleventh Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1998, Stara Lesna, Slovakia

Abstract

In this review paper a survey of the most significant optical methods usable for characterizing solid surfaces is performed. Examples allowing to show practical features of applying these methods at investigating the surfaces mentioned are presented too. By means of these examples both a reliability and accuracy of the method are namely demonstrated.

Citation Download Citation

Ivan Ohlidal "Optical methods for surface characterization", Proc. SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (14 July 1999); https://doi.org/10.1117/12.353096

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