Deposition of sol-gel-derived inorganic and composite material films on InP for integrated optics

Jian Liu; Yee Loy Lam; Yuen Chuen Chan; Yan Zhou; Wenxiu Que; Gu Tan; Boon Siew Ooi

doi:10.1117/12.370341

12 November 1999 Deposition of sol-gel-derived inorganic and composite material films on InP for integrated optics

Jian Liu, Yee Loy Lam, Yuen Chuen Chan, Yan Zhou, Wenxiu Que, Gu Tan, Boon Siew Ooi

Proceedings Volume 3896, Design, Fabrication, and Characterization of Photonic Devices; (1999) https://doi.org/10.1117/12.370341
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

In this paper, we present the fabrication of sol-gel derived silica based films on InP using both inorganic and composite material precursors. Thin silica films with thicknesses less than 0.5 μm, are achieved using an inorganic precursor by means of multiple spin coatings and rapid thermal processing at an annealing temperature of 450°C. The cracking pattern of the inorganic silica film on InP is analyzed. Thick films are derived from composite materials by multiple spin coatings with only furnace baking at 150°C. In addition, the different properties of each type of films and their potential applications in terms of monolithic integration are discussed.

Citation Download Citation

Jian Liu, Yee Loy Lam, Yuen Chuen Chan, Yan Zhou, Wenxiu Que, Gu Tan, and Boon Siew Ooi "Deposition of sol-gel-derived inorganic and composite material films on InP for integrated optics", Proc. SPIE 3896, Design, Fabrication, and Characterization of Photonic Devices, (12 November 1999); https://doi.org/10.1117/12.370341

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