Theoretical backgrounds of methods of angle-resolved and total integral scattering for precise dielectric surfaces

K. Malitsky

doi:10.1117/12.420968

23 March 2001 Theoretical backgrounds of methods of angle-resolved and total integral scattering for precise dielectric surfaces

K. Malitsky

Author Affiliations +

Proceedings Volume 4350, Laser Optics 2000: Solid State Lasers; (2001) https://doi.org/10.1117/12.420968
Event: Laser Optics 2000, 2000, St. Petersburg, Russian Federation

Abstract

Theoretical models of light scattering methods are considered for precise dielectric surfaces. By use of microscopic treatment it is shown, that polarization of near-surface medium in the presence of roughness differs from that in the volume of medium. Simple theoretical model of near-surface polarization dependence due to effective field difference is presented for the case of s-polarized incident light. Corresponding light scattering is calculated by use of quasi-microscopic approach. It is shown that the intensity of scattering decreases noticeably for very smooth surfaces, which height deviations are compared with interatomic distance (approximately 5 A for SiO₂). Therefore the differences of power spectral density functions measured by angle-resolved scattering and atomic force microscopy methods may be qualitatively explained.

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K. Malitsky "Theoretical backgrounds of methods of angle-resolved and total integral scattering for precise dielectric surfaces", Proc. SPIE 4350, Laser Optics 2000: Solid State Lasers, (23 March 2001); https://doi.org/10.1117/12.420968

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