Automated assembly of holder chips to AFM probes

Gunther Reinhart; Dirk Jacob; Marc Fouchier

doi:10.1117/12.444140

8 October 2001 Automated assembly of holder chips to AFM probes

Gunther Reinhart, Dirk Jacob, Marc Fouchier

Proceedings Volume 4568, Microrobotics and Microassembly III; (2001) https://doi.org/10.1117/12.444140
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States

Abstract

At the Belgian institute IMEC techniques for the production of electrically conductive atomic force microscope (AFM) probes are developed. To facilitate handling of the fragile probes, holder chips are required. The assembly of such holder chips, which can be split up into the application of solder paste, the positioning of the holder chip and the soldering of the chip, is a crucial manufacturing step, that, until now, was performed manually for economic reasons. With the help of a modular micro assembly tool, developed by the Institute for Machine Tools and Industrial Management (iwb) of the Technische Universitaet Muenchen, an economical automated assembly of the holder chips was developed. Thanks to our integrated sensor technology, even the automated assembly onto the extremely fragile membranes of moulded AFM probes was possible. In particular, the dispensing process of the solder paste onto the membranes was improved by the integration of a non-contact sensor for the needle clearance.

Citation Download Citation

Gunther Reinhart, Dirk Jacob, and Marc Fouchier "Automated assembly of holder chips to AFM probes", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); https://doi.org/10.1117/12.444140

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