Polarization Sensitive Raman Microprobe Studies Of Local Crystal Quality In Laser Annealed Silicon

J. B. Hopkins; L. A. Farrow; G. J. Fisanick

doi:10.1117/12.941358

31 May 1984 Polarization Sensitive Raman Microprobe Studies Of Local Crystal Quality In Laser Annealed Silicon

J. B. Hopkins, L. A. Farrow, G. J. Fisanick

Proceedings Volume 0463, Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials; (1984) https://doi.org/10.1117/12.941358
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

The technique of Raman microprobe spectroscopy has been extended to allow polarization sensitive characterization of local crystal quality with lateral mapping capability. Computer minimization algorithms have been utilized to invert Raman scattering intensity versus incident laser polarization information to local crystal orientation. This microprobe method has been applied to investigate the quality of laser annealed polysilicon over oxide films. During the course of laterally seeded epitaxial regrowth of silicon over the oxide film, it was found that the annealed crystal tends to develop large grains of varied size and orientation. Measurements of the local phonon frequency shift, which monitors strain in the material, show large variations across the structures. It is demonstrated that the strain inferred from phonon frequency shifts must be interpreted in terms of the local crystal orientation.

Citation Download Citation

J. B. Hopkins, L. A. Farrow, and G. J. Fisanick "Polarization Sensitive Raman Microprobe Studies Of Local Crystal Quality In Laser Annealed Silicon", Proc. SPIE 0463, Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials, (31 May 1984); https://doi.org/10.1117/12.941358

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available