Highly luminescent Si quantum dots: new ways for size, position, and density control

Margit Zacharias; Johannes Heitmann; Lixin Yi; Rolf Scholz; Manfred Reiche; Ulrich M. Goesele

doi:10.1117/12.452220

5 November 2002 Highly luminescent Si quantum dots: new ways for size, position, and density control

Margit Zacharias, Johannes Heitmann, Lixin Yi, Rolf Scholz, Manfred Reiche, Ulrich M. Goesele

Proceedings Volume 4808, Optical Properties of Nanocrystals; (2002) https://doi.org/10.1117/12.452220
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Phase separation and thermal crystallization of SiO/SiO₂ superlattices result in ordered arranged silicon nanocrystals. The preparation method enables independent control of particle size as well as of particle density and spatial position by using a constant stoichiometry of the layers. Infrared absorption and photoluminescence spectra are measured as a function of annealing temperature to study the phase separation process. Three photoluminescence emission bands are observed. A band centered at 560 nm is found in as-prepared samples and vanishes for annealing above 700^oC. A second band around 760 nm to 890 nm is detected for annealing temperatures above 500^oC. The superlattices show a strong luminescence and a size dependent blue shift in the visible and near-infrared region after crystallization for temperatures above 900^oC. The origin of the different photoluminescence bands at different phase separation stages of ultra thin SiO_x layers are discussed based on transmission electron microscopy investigations and on correlations seen in photoluminescence spectra and infrared absorption. In addition, we report the PECVD preparation of amorphous SiO/SiO₂ superlattices which show a similar size dependent luminescence after crystallization.

Citation Download Citation

Margit Zacharias, Johannes Heitmann, Lixin Yi, Rolf Scholz, Manfred Reiche, and Ulrich M. Goesele "Highly luminescent Si quantum dots: new ways for size, position, and density control", Proc. SPIE 4808, Optical Properties of Nanocrystals, (5 November 2002); https://doi.org/10.1117/12.452220

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