Structural properties of SnO2:Sb transparent conducting films deposited on flexible substrates

Jin Ma; Hong-Lei Ma; Shi-Yong Zhang; Yingge Yang; Shu-Lai Huang; Xiao-Tao Hao

doi:10.1117/12.483085

17 September 2002 Structural properties of SnO₂:Sb transparent conducting films deposited on flexible substrates

Jin Ma, Hong-Lei Ma, Shi-Yong Zhang, Yingge Yang, Shu-Lai Huang, Xiao-Tao Hao

Proceedings Volume 4918, Materials, Devices, and Systems for Display and Lighting; (2002) https://doi.org/10.1117/12.483085
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Antimony doped tin oxide films have been deposited on flexible substrates such as polyimide and polypropylene adipate. And the structural properties of the films have been investigated. The XRD measurements reveal that all of the obtained films were polycrystalline with the rutile structure. With increasing the substrate temperature and film thickness, the crystallinity of the resulting films is improved and the crystalline size becomes larger. The substrate temperature and film thickness dependence of crystallinity for the SnO₂:Sb films were further revealed by their atomic force micrographs, which is consistent with the XRD observations. The XPS details of the SnO₂:Sb films are also given. The tin core levels Sn 3d_5/2 are observed at 486.5 and 494.9 eV, respectively, while the O 1s peak is obtained at 530.6 eV. It can be seen that the oxygen peak in the spectra is asymmetric, which is due to the concealed Sb 3d peak. The gap between the Sn 3d_5/2 and Sn 3d_3/2 levels is approximately the same as in the standard spectrum of Sn.

Citation Download Citation

Jin Ma, Hong-Lei Ma, Shi-Yong Zhang, Yingge Yang, Shu-Lai Huang, and Xiao-Tao Hao "Structural properties of SnO₂:Sb transparent conducting films deposited on flexible substrates", Proc. SPIE 4918, Materials, Devices, and Systems for Display and Lighting, (17 September 2002); https://doi.org/10.1117/12.483085

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