Arrayed microneedles for mechanical gene insertion

Gonzalo Cabodevila; Bruno Lepioufle; Hiroyuki Fujita

doi:10.1117/12.473962

14 November 2002 Arrayed Micro Needles for Mechanical Gene Insertion

Gonzalo Cabodevila, Bruno Lepioufle, Hiroyuki Fujita

Proceedings Volume 4937, Biomedical Applications of Micro- and Nanoengineering; (2002) https://doi.org/10.1117/12.473962
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

A novel approach to realize arrays of out of plane micro needles is given. The exterior shape of the micro needles is realized by dry etching using a RIE. The exterior shape is realized in silicon by dry etching using a SF₆ and Argon plasma that achieve the progressive etching of the mask composed by silicon nitride and photoresist. The needles realized present an outer diameter of 900 nm for a height of about 7 microns. The needle is then realized by wet oxidation using a thin film of silicon nitride to perform a LOCOS at the end of the needle. The last step consists in selectively etch the Si₃N₄ and the silicon inside the needle by xenon difluoride.

Citation Download Citation

Gonzalo Cabodevila, Bruno Lepioufle, and Hiroyuki Fujita "Arrayed Micro Needles for Mechanical Gene Insertion", Proc. SPIE 4937, Biomedical Applications of Micro- and Nanoengineering, (14 November 2002); https://doi.org/10.1117/12.473962

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