Three-dimensional microfabrication with femtosecond laser pulses

Jesper Serbin; R. Houbertz; Carsten Fallnich; Boris N. Chichkov

doi:10.1117/12.468235

15 April 2003 Three-dimensional microfabrication with femtosecond laser pulses

Jesper Serbin, R. Houbertz, Carsten Fallnich, Boris N. Chichkov

Proceedings Volume 4941, Laser Micromachining for Optoelectronic Device Fabrication; (2003) https://doi.org/10.1117/12.468235
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

Investigations on two-photon polymerization of inorganic-organic hybrid materials initiated by femtosecond Ti:sapphire laser pulses are performed. The applied resins are designed for ultraviolet photo-lithography and contain photo-initiators sensitive to 390 nm radiation. These resins exhibit exceptionally good mechanical, optical, and chemical properties and can be microstructured by laser-enforced transition from liquid to solid state. These materials are transparent in the infrared, therefore, by tightly focusing femtosecond laser pulses into the volume of a liquid resin, two-photon polymerization can be initiated in a small focal region inside the liquid. First applications of this technique for the fabrication of three-dimensional microstructures and photonic crystals in inorganic-organic hybrid polymers with a structure size down to 200 nm and a periodicity of 450 nm are discussed.

Citation Download Citation

Jesper Serbin, R. Houbertz, Carsten Fallnich, and Boris N. Chichkov "Three-dimensional microfabrication with femtosecond laser pulses", Proc. SPIE 4941, Laser Micromachining for Optoelectronic Device Fabrication, (15 April 2003); https://doi.org/10.1117/12.468235

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