Rigorous coupled-wave analysis for multilayered grating structures

Wook Lee; Fahrettin Levent Degertekin

doi:10.1117/12.473179

19 June 2003 Rigorous coupled-wave analysis for multilayered grating structures

Proceedings Volume 4987, Integrated Optics: Devices, Materials, and Technologies VII; (2003) https://doi.org/10.1117/12.473179
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States

Abstract

A numerically stable and systematic implementation of the rigorous coupled-wave analysis (RCWA) for the general multilayered grating structures is presented for both TE and TM modes. Numerical results of the approach are shown for the diffraction-based optical device as an example and are compared with the scalar diffraction method to illustrate the limited applicability of the scalar analysis.

Citation Download Citation

Wook Lee and Fahrettin Levent Degertekin "Rigorous coupled-wave analysis for multilayered grating structures", Proc. SPIE 4987, Integrated Optics: Devices, Materials, and Technologies VII, (19 June 2003); https://doi.org/10.1117/12.473179

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