Computational multi-field mechanics model of piezoelectric micro-resonators

Sergio Preidikman; Balakumar Balachandran

doi:10.1117/12.599146

19 May 2005 Computational multi-field mechanics model of piezoelectric micro-resonators

Sergio Preidikman, Balakumar Balachandran

Proceedings Volume 5757, Smart Structures and Materials 2005: Modeling, Signal Processing, and Control; (2005) https://doi.org/10.1117/12.599146
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

A computational multi-field mechanics model of composite micromechanical systems (MEMS) with piezoelectric actuation and sensing has been developed as a design tool for micro-resonators. These devices are to be used for filters and other signal processing applications. The developed dynamic model of MEMS resonators accounts for structural properties and the electromechanical coupling effect through finite element analysis. It is assumed that the deflection is large and that the geometric nonlinearity must be included. The mechanical strain is assumed to be small so that the linear constitutive relations are valid. The dynamic admittance model is derived by combining the linear piezoelectric constitutive equations with the modal transfer function of the micro-resonator structure. The resonator receptance matrix is constructed through modal summation by considering only a limited number of dominant modes. The electromechanical coupling determination at the input and output ports makes use of the converse and direct piezoelectric effects. In the development of the finite-element models, boundary conditions, electrodes shaping, and factors such as varying elastic modulus across the length of the beam for the multilayered structure are taken into account. The coupled model can be used to carry out sensitivity studies with respect to the following: i) resonator thickness and length; ii) influence of constant axial forces on the transverse vibrations of clamped-clamped micro-resonators; geometry of the drive and sense electrodes; and iii) imperfect boundary conditions due to mask imperfections and fabrication procedure. The developed model has been validated by comparing the predictions with results available in the literature for clamped-clamped resonators.

Citation Download Citation

Sergio Preidikman and Balakumar Balachandran "Computational multi-field mechanics model of piezoelectric micro-resonators", Proc. SPIE 5757, Smart Structures and Materials 2005: Modeling, Signal Processing, and Control, (19 May 2005); https://doi.org/10.1117/12.599146

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
12 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Resonators

Microresonators

Electrodes

Microelectromechanical systems

Composites

Finite element methods

Sensors

Show All Keywords

Keywords/Phrases

Search In:

Publication Years