The Vanderbilt University nanoscale science and engineering fabrication laboratory

Anthony B. Hmelo; Edward F. Belbusti; Mark L. Smith; Sean J. Brice; Robert F. Wheaton

doi:10.1117/12.617307

29 August 2005 The Vanderbilt University nanoscale science and engineering fabrication laboratory

Anthony B. Hmelo, Edward F. Belbusti, Mark L. Smith, Sean J. Brice, Robert F. Wheaton

Proceedings Volume 5933, Buildings for Nanoscale Research and Beyond; 59330E (2005) https://doi.org/10.1117/12.617307
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Vanderbilt University has realized the design and construction of a 1635 sq. ft. Class 10,000 cleanroom facility to support the wide-ranging research mission associated with the Vanderbilt Institute for Nanoscale Science and Engineering (VINSE). By design we have brought together disparate technologies and researchers formerly dispersed across the campus to work together in a small contiguous space intended to foster interaction and synergy of nano-technologies not often found in close proximity. The space hosts a variety of tools for lithographic patterning of substrates, the deposition of thin films, the synthesis of diamond nanostructures and carbon nanotubes, and a variety of reactive ion etchers for the fabrication of nanostructures on silicon substrates. In addition, a separate 911 sq. ft. chemistry laboratory supports nanocrystal synthesis and the investigation of biomolecular films. The design criteria required an integrated space that would support the scientific agenda of the laboratory while satisfying all applicable code and safety concerns. This project required the renovation of pre-existing laboratory space with minimal disruption to ongoing activities in a mixed-use building, while meeting the requirements of the 2000 edition of the International Building Code for the variety of potentially hazardous processes that have been programmed for the space. In this paper we describe how architectural and engineering challenges were met in the areas of mitigating floor vibration issues, shielding our facility against EMI emanations, design of the contamination control facility itself, chemical storage and handling, toxic gas use and management, as well as mechanical, electrical, plumbing, lab security, fire and laboratory safety issues.

Citation Download Citation

Anthony B. Hmelo, Edward F. Belbusti, Mark L. Smith, Sean J. Brice, and Robert F. Wheaton "The Vanderbilt University nanoscale science and engineering fabrication laboratory", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 59330E (29 August 2005); https://doi.org/10.1117/12.617307

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available