Stratified scattering model for inhomogeneous dielectric multilayer coatings

H. H. Hou; Y. Fan; C. R. Xue; J. H. Xing

doi:10.1117/12.783006

14 November 2007 Stratified scattering model for inhomogeneous dielectric multilayer coatings

H. H. Hou, Y. Fan, C. R. Xue, J. H. Xing

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67221I (2007) https://doi.org/10.1117/12.783006
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

A stratified model for scattering from multilayer coatings due to roughness of inhomogeneous interfaces is introduced in the paper. It assumes that a rough interface between two media of multilayer coatings consists of a series of very thin, homogeneous sub-layers and that there is an exponential increase in refractive indices of those sub-layers. Matrix method was used to deduce the formulation for calculating the total integrated scattering (TIS). ZrO₂ coatings were deposited on BK7 glass by electron beam evaporation, and their scattering properties were measured and calculated by the scatterometer, the stratified scattering model and the existing uncorrelated surface roughness model, respectively. It is shown that the calculated results based on predictions of the stratified scattering model are in closer correspondence with the experimental data than that obtained with uncorrelated surface roughness model.

Citation Download Citation

H. H. Hou, Y. Fan, C. R. Xue, and J. H. Xing "Stratified scattering model for inhomogeneous dielectric multilayer coatings", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67221I (14 November 2007); https://doi.org/10.1117/12.783006

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