Techniques For Measuring Optical Constants Of Dielectric Films

Marie Garcia; Angus Macleod

doi:10.1117/12.939543

23 December 1986 Techniques For Measuring Optical Constants Of Dielectric Films

Marie Garcia, Angus Macleod

Proceedings Volume 0678, Optical Thin Films II: New Developments; (1986) https://doi.org/10.1117/12.939543
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Several independent techniques have been explored for the measurement of optical constants of a single film on a glass substrate. One technique, inspired by Abeles, is based on comparing the reflectance of coated and uncoated sections of a substrate under "s" and "p" polarized light until a balance is found. This method is effective over a wide range of film thicknesses. Another technique is an envelope method based on an inhomogeneous model. To begin, an assumption is made of reflectance and transmittance on a spectrophotometer. The index is determined from measurements of the apparent refractive index . If the index and the thickness of the film are large enough to allow waveguide transmission, then the most direct means of measuring film index or thickness of the film is by determining the effective index "N." With a prism coupler, "N" can be found by measuring the coupling angle.

Citation Download Citation

Marie Garcia and Angus Macleod "Techniques For Measuring Optical Constants Of Dielectric Films", Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); https://doi.org/10.1117/12.939543

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