New transducer material concepts for biosensors and surface functionalization

Anita Lloyd Spetz; Ruth Pearce; Linnea Hedin; Volodymyr Khranovskyy; Fredrik Söderlind; Per-Olov Käll; Rositza Yakimova; Kajsa Uvdal

doi:10.1117/12.821662

18 May 2009 New transducer material concepts for biosensors and surface functionalization

Anita Lloyd Spetz, Ruth Pearce, Linnea Hedin, Volodymyr Khranovskyy, Fredrik Söderlind, Per-Olov Käll, Rositza Yakimova, Kajsa Uvdal

Author Affiliations +

Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 736206 (2009) https://doi.org/10.1117/12.821662
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

Wide bandgap materials like SiC, ZnO, AlN form a strong platform as transducers for biosensors realized as e.g. ISFET (ion selective field effect transistor) devices or resonators. We have taken two main steps towards a multifunctional biosensor transducer. First we have successfully functionalized ZnO and SiC surfaces with e.g. APTES. For example ZnO is interesting since it may be functionalized with biomolecules without any oxidation of the surface and several sensing principles are possible. Second, ISFET devises with a porous metal gate as a semi-reference electrode are being developed. Nitric oxide, NO, is a gas which participates in the metabolism. Resistivity changes in Ga doped ZnO was demonstrated as promising for NO sensing also in humid atmosphere, in order to simulate breath.

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Anita Lloyd Spetz, Ruth Pearce, Linnea Hedin, Volodymyr Khranovskyy, Fredrik Söderlind, Per-Olov Käll, Rositza Yakimova, and Kajsa Uvdal "New transducer material concepts for biosensors and surface functionalization", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736206 (18 May 2009); https://doi.org/10.1117/12.821662

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