Paper
18 May 2009 An envelope model to describe the sensor dynamics of vibratory gyroscopes
Author Affiliations +
Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 73620B (2009) https://doi.org/10.1117/12.821705
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany
Abstract
In this contribution, a method will be introduced to derive an envelope model for vibratory gyroscopes capturing the essential "slow" dynamics (envelope) of the system. The methodology will be exemplarily carried out for a capacitive gyroscope with electrostatic actuators and sensors. The resulting envelope model can be utilized for transient simulations with the advantage of a significantly increased simulation speed as well as for steady state simulations. Especially for the sensor design and optimization, where usually very complex mathematical models are used, efficient steady state simulations are of certain interest. Another great advantage of this approach is that the steady state solutions in terms of the envelope model are constant. Thus, for the controller design, a linearization of the nonlinear envelope model around the steady state solution yields a linear time-invariant system allowing for the application of the powerful methods known from linear control theory.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Markus Egretzberger and Andreas Kugi "An envelope model to describe the sensor dynamics of vibratory gyroscopes", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620B (18 May 2009); https://doi.org/10.1117/12.821705
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Cited by 3 scholarly publications.
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KEYWORDS
Gyroscopes

Mathematical modeling

Sensors

Actuators

Computer aided design

Fourier transforms

Device simulation

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