An improved phase quadrature correction method by fitting the pesudo quadrature phase difference

Chao-Wen Liang; Yung-Sheng Tsai

doi:10.1117/12.825854

21 August 2009 An improved phase quadrature correction method by fitting the pesudo quadrature phase difference

Chao-Wen Liang, Yung-Sheng Tsai

Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 74050O (2009) https://doi.org/10.1117/12.825854
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

A novel type of homodyne interferometer with a real time nonlinearity tracking and compensation algorithm is presented. This interferometer measures the displacement motion of an object with a single measuring laser beam and two photodiodes with π/2 phase difference. A novel nonlinearity correction method is derived based on minimizing pseudo phase difference between the quadrature channels. Experiment results shows that this method could correct not only the quadrature error caused by imperfection and misalignment of polarization optics, but also the variation of interference intensity related to laser power variation.

Citation Download Citation

Chao-Wen Liang and Yung-Sheng Tsai "An improved phase quadrature correction method by fitting the pesudo quadrature phase difference", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050O (21 August 2009); https://doi.org/10.1117/12.825854

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