Periodic microstructures induced by interfered femtosecond laser pulses

Zhongyi Guo; Shiliang Qu; Shutian Liu; Jung-Ho Lee

doi:10.1117/12.866233

22 October 2010 Periodic microstructures induced by interfered femtosecond laser pulses

Zhongyi Guo, Shiliang Qu, Shutian Liu, Jung-Ho Lee

Proceedings Volume 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 76570K (2010) https://doi.org/10.1117/12.866233
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Various periodic structures have been fabricated on the surface of the transparent glass by a single shot of two or three pulses. When a single shot of two pulses interfered with each other, not only did we get the ordinary grating whose period was agreed well with a theoretical estimation, but also obtained the extraordinary grating whose period was a half of that in the ordinary grating. When a single shot of three pulses interfered with each other, two-dimensional periodic microstructures distributing as a hexagonal lattice have been obtained. Different morphologies of the induced structures such as microvoids, orbicular platforms, and nanotips, could be formed with changing the pulse energy.

Citation Download Citation

Zhongyi Guo, Shiliang Qu, Shutian Liu, and Jung-Ho Lee "Periodic microstructures induced by interfered femtosecond laser pulses", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 76570K (22 October 2010); https://doi.org/10.1117/12.866233

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